| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Taiwan | 7 | |
| #2 | United States | 7 | |
| #3 | China | 3 | |
| #4 | EPO (European Patent Office) | 3 | |
| #5 | Japan | 1 |
| # | Industry | |
|---|---|---|
| #1 | Surface technology and coating | |
| #2 | Semiconductors | |
| #3 | Electrical machinery and energy | |
| #4 | Machines | |
| #5 | Optics | |
| #6 | Chemical engineering |
| # | Name | Total Patents |
|---|---|---|
| #1 | Voser Stephan | 6 |
| #2 | Weichart Juergen | 5 |
| #3 | Gaechter Bruno | 3 |
| #4 | Bazlen Rolf | 3 |
| #5 | Kratzer Martin | 3 |
| #6 | Felzer Heinz | 2 |
| #7 | Mamazza Jr Robert | 2 |
| #8 | Elghazzali Mohamed | 2 |
| #9 | Ravelli Fabio Antonio | 2 |
| #10 | Plagwitz Heiko | 2 |
| Publication | Filing date | Title |
|---|---|---|
| CN105917266A | Apparatus and process for annealing of anti-fingerprint coatings | |
| CN105683406A | Method for filling vias and substrate-via filling vacuum processing system | |
| TW201316390A | Sputter etching chamber and method of sputtering |