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Automated spatial flipping apparatus and system for photomasks and photomasks with pellicles
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Broadband optical metrology with reduced wave front distortion, chromatic dispersion compensation and monitoring
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Integrated local and global optical metrology for samples having miniature features
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Efficient calculation of grating matrix elements for 2-D diffraction
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Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer
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Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage
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Efficient characterization of symmetrically illuminated symmetric 2-D gratings
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System and method for high intensity small spot optical metrology
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Spectrophotometric system with reduced angle of incidence
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System and method for measuring overlay alignment using diffraction gratings
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System and method for efficient characterization of diffracting structures with incident plane parallel to grating lines
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Photomask flipper and single direction inspection device for dual side photomask inspection
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Optical determination of pattern feature parameters using a scalar model having effective optical properties
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Disc clamping device for multiple standard discs
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Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size
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Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes
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Compact pinlifter assembly integrated in wafer chuck
