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KR20190005628A
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Sputtering device including magnetic flux block
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KR20170124779A
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Double Tube Bellows
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KR20170107623A
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Platen and Sputtering Apparatus having the Same
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KR20170060630A
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Clamp short detection device of film forming apparatus
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KR20170029061A
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sputter Shield Module for Sputtering Apparatus
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KR20170020643A
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Sputtering device capable of adjust tilting angle of target
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KR20160132246A
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Sputtering Device Controlling residual stress of substrate
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KR20160062805A
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Sputtering Device Controlling residual stress of thin film
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KR101608946B1
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Mask Shield Module and Sputtering Apparatus having the Same
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KR20160056343A
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Vacuum Film Coating Apparatus
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KR20140138048A
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Sputtering Device having split type magnet
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KR20150129195A
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Loading chamber in thin film depositing apparatus and method for removing dust using the same
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KR20150108656A
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System of processing substrate
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KR20150108657A
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Apparatus of treating substrate, method of operating the same, and method of manufacturing substrate using the same
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KR20150061464A
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Sputtering Apparatus having Electrostatic Chuck
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KR20140136112A
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Rotatable Target and Process Chamber having the Same
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KR20140117890A
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Apparatus of treating substrate, and methods of manufacturing substrate for electronic device and flat display device using the same
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KR20140106925A
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Apparatus of treating substrate, and methods of manufacturing substrate for electronic device and flat display device using the same
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KR101421637B1
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Apparatus for Recycling Non-active gas in Sputter
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KR20130114778A
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Non-magnetron sputtering apparatus
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