| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 12 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Machine tools | |
| #3 | Electrical machinery and energy | |
| #4 | Environmental technology | |
| #5 | Machines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Kobayashi Naoyuki | 12 |
| #2 | Owa Soichi | 6 |
| #3 | Shiraishi Kenichi | 5 |
| #4 | Mizuno Yasushi | 5 |
| #5 | Tanimoto Akikazu | 4 |
| #6 | Nakano Katsushi | 4 |
| #7 | Omura Yasuhiro | 2 |
| #8 | Hirukawa Shigeru | 2 |
| #9 | Nishino Tokuji | 1 |
| #10 | Tanigawa Kazuo | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2008106707A1 | Exposure apparatus, exposure method, and method for producing device |