| # | Country | Total Patents | |
|---|---|---|---|
| #1 | EPO (European Patent Office) | 9 | |
| #2 | United States | 7 | |
| #3 | WIPO (World Intellectual Property Organization) | 7 | |
| #4 | Japan | 3 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Surface technology and coating | |
| #3 | Chemical engineering | |
| #4 | Materials and metallurgy | |
| #5 | Machines | |
| #6 | Engines, pumps and turbines | |
| #7 | Machine tools |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Coating metallic material | |
| #3 | Cleaning | |
| #4 | Treatment of glass | |
| #5 | Unspecified technologies | |
| #6 | Metallic material removal | |
| #7 | Pumps | |
| #8 | Blasting |
| # | Name | Total Patents |
|---|---|---|
| #1 | Butterbaugh Jeffery W | 9 |
| #2 | Gray David C | 9 |
| #3 | Mehta Jitesh | 4 |
| #4 | Fayfield Robert T | 4 |
| #5 | Hiatt C Fred | 3 |
| #6 | Debitsudo Shii Guree | 2 |
| #7 | Heitzinger John | 2 |
| #8 | Olson Erik D | 2 |
| #9 | Becker Scott D | 2 |
| #10 | Armstrong Keith | 2 |
| Publication | Filing date | Title |
|---|---|---|
| US6099272A | Peristaltic pump with flow control | |
| WO9726675A1 | Vacuum compatible water vapor and rinse process module | |
| US5782986A | Process for metals removal using beta-diketone or beta-ketoimine ligand forming compounds | |
| US5567332A | Micro-machine manufacturing process | |
| JPH0864559A | Method of deleting unnecessary substance from substrate surface | |
| US5580421A | Apparatus for surface conditioning | |
| US5635102A | Highly selective silicon oxide etching method | |
| US5534107A | UV-enhanced dry stripping of silicon nitride films |