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temperature-adjusting device for high temperature having an open or close adjusting valve system
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A Chiller including a switching module and A Chiller System for a semiconductor chamber including the same
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Extreme ultraviolet ray generator using high harmonic wave with improved pollution prevention performance
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Fine metal mask and method of manufacturing pellicle for EUV lithography using the same
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Temperature Controller of selected area for Gas cylinder
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Pellicle mount system, stud attachment apparatus, pellicle attachment apparatus, and pellicle attachment method
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Inspection system for extreme ultra violet lithography pellicle
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Vacuum adsorption device and extreme ultra violet pellicle transfer machine
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Sealing capsule for inspecting extreme ultra violet lithography pellicle
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Vision inspection system
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Wafer alignment apparatus, wafer alignment method, and correction method of wafer alignment apparatus
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Temperature controlling device and Processing apparatus of semiconductor including the same
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Temperature Controlling Apparatus for Thermoelectric Electrostatic Chuck, Thermoelectric Electrostatic Chuck including the same
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