GB1131189A
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Improvements in or relating to apparatus for depositing thin films
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US3361340A
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High vacuum pumping system
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GB1106970A
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Improvements in or relating to sources of vaporized material
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US3305473A
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Triode sputtering apparatus for depositing uniform coatings
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US3313474A
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Vaporized material source
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US3298599A
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Pump nozzle
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US3251538A
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Method of producing vacuum
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US3254152A
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Vacuum apparatus
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US3241740A
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Vacuum pumping methods and apparatus
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US3251536A
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Getter-ion pumps
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US3239130A
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Gas pumping methods and apparatus
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US3197122A
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Ion pump
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US3227361A
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Heater for vacuum pump
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US3186632A
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Ionization vacuum pump
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US3235170A
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Getter supply
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US3152689A
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Getter supply
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US3121155A
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Apparatus for evaporating a material within an ion pump
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US3186743A
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Glass-to-metal tube coupling having indium seal means
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GB1000437A
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Improvements in or relating to high vacuum diffusion pumps
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US3075689A
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Vacuum pump
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