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Sputtering apparatus and method
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Soft sputtering magnetron system
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Method to manufacture an oxide sputter target comprising a first and second phase
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Multiple grooved vacuum coupling
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Insert piece for an end-block of a sputtering installation
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Insert piece for an end-block of a sputtering installation
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Rotatable sputter target
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A rotatable sputter target
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Single, right-angled end-block
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Sputter module.
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An end-block for a rotatable target sputtering apparatus
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A tubular magnet assembly
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Method to reduce thermal stresses in a sputter target
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Rotating tubular sputter target assembly
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Universal vacuum coupling for cylindrical target
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