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Lightweight carrier structure, particularly for optical components, and method for its production
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Method and device for measuring the shape of a wavefront of an optical radiation field
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Method of making an electrostatic chuck
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Electrostatic holding device with a ceramic electrode and method for producing such a holding device
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Electrostatic holding device with an electrode carrier disk
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Solid body joining of a carrier body and a cover layer, in particular by anodic bonding
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Method for producing a carrier of an electrostatic clamp
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