| # | Country | Total Patents | |
|---|---|---|---|
| #1 | WIPO (World Intellectual Property Organization) | 8 | |
| #2 | Taiwan | 6 |
| # | Industry | |
|---|---|---|
| #1 | Machine tools | |
| #2 | Chemical engineering | |
| #3 | Semiconductors | |
| #4 | Mechanical elements |
| # | Technology | |
|---|---|---|
| #1 | Grinding or polishing devices | |
| #2 | Cleaning | |
| #3 | Semiconductor devices | |
| #4 | Shafts | |
| #5 | Drying solid materials by removing liquid |
| # | Name | Total Patents |
|---|---|---|
| #1 | Yin Ying | 8 |
| #2 | Li Ting | 7 |
| #3 | Fei Jiuhai | 3 |
| #4 | Shi Xiao | 3 |
| #5 | Liu Bin | 3 |
| #6 | Zhang Weiqiang | 2 |
| #7 | Li Si | 2 |
| #8 | Li Wei | 2 |
| #9 | Jin Yang | 2 |
| #10 | Liu Fuqiang | 2 |
| Publication | Filing date | Title |
|---|---|---|
| WO2018113347A1 | Concentric clamping structure of cleaning brush of cmp post-cleaning device, and usage method |