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SPEEDFAM CO LTD

Overview
  • Total Patents
    641
  • GoodIP Patent Rank
    17,451
  • Filing trend
    ⇩ 45.0%
About

SPEEDFAM CO LTD has a total of 641 patent applications. It decreased the IP activity by 45.0%. Its first patent ever was published in 1986. It filed its patents most often in Japan, United States and Taiwan. Its main competitors in its focus markets machine tools, semiconductors and electrical machinery and energy are FUJIKOSHI MACHINERY CORP, CALITECH CO LTD and APLEX INC.

Patent filings per year

Chart showing SPEEDFAM CO LTDs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Hakomori Shunji 76
#2 Arai Hatsuyuki 67
#3 Yanagisawa Michihiko 54
#4 Inoue Yusuke 47
#5 Iida Shinya 35
#6 Hakomori Shiyunji 34
#7 Tanaka Hiroaki 33
#8 Sugiyama Misuo 32
#9 Yashiki Hiroshi 29
#10 Nagayama Hitoshi 29

Latest patents

Publication Filing date Title
CN111993267A Workpiece planetary wheel and manufacturing method thereof
JP2020192665A Workpiece carrier and method for manufacturing workpiece carrier
JP2020124750A Dressing device for double sided polishing machine
JP2020072126A Local dry etching device
JP2020011329A Processing liquid switching device
JP2019201168A Local dry etching device
JP2019181657A Polishing apparatus
JP2018148212A Notch portion polishing pad and manufacturing method thereof
JP2019058994A Manufacturing method of workpiece carrier and widening member for polishing of workpiece carrier
JP2019042896A Carrier for holding material to be polished for double-sided polishing apparatus
JP2018202580A Polishing device
JP2018176304A Double-sided polishing device
JP2018167383A Work carrier and method for manufacturing work carrier
JP2018058186A Flat surface polishing device
JP2018058176A Workpiece carrier and manufacturing method of the workpiece carrier
JP2018015831A Work carrier, and manufacturing method of work carrier
JP2018012821A Grinding liquid
JP2018012166A Polishing device
JP2018001392A Abradant
JP2017209744A Plate thickness measuring window structure of work