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High-frequency tube cathode
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High-frequency tube cathode
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Method and arrangement for the dielectric heating of plastic pipes
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Method and arrangement for high frequency heating of plastic pipes with plasma electrode
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Matching network with integrated low pass filter has parallel capacitors, series coil, adjustable series capacitor, parallel coil, optional series coil and adjustable series capacitor
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Plasma torch for treating surfaces at atmospheric pressure includes a jet pump within torch to provide low pressure region
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Unit for treating hollow body in vacuum recipient is useful for sterilization and/or surface modification, e.g. of plastics or glass bottle for food, cosmetics or pharmaceuticals
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Automatic tuning method and device for HF impedance matching network for plasma process uses cyclic measurement of electrical parameters and adjustment of tuning components in alternation
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Arrangement for treatment of substrates e.g. wafers during the finishing of electronic and microelectronic components comprises substrate support plates arranged over each other in a vacuum chamber
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High frequency electrical transmission, for use with high frequency generator, e.g. 13.56 MHz, includes a waveguide in the transfer path such that the high frequency is transferred in the form of helical waves
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Structured coating process used in metallizing processes comprises applying a material to a substrate, covering the substrate and the material with a coating and then removing the material together with the coating
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Vacuum chamber for drying, melting, surface treatment, PVD and CVD coating, etching and other plasma processes comprises functional units flange-connected to frame structure of interlocked profiles
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Apparatus and method for avoiding arcing by active arc suppression during sputtering
