Cleanroom system with a handling unit that can be moved in a cleanroom area
DE102013018291A1
Work unit of a clean room facility
DE102013016597A1
System for loading and unloading clean room systems with large-area substrates
DE102013016598A1
Clean room transport container with chassis
DE102013009484A1
Processing plant of polar structure for planar substrates
DE102010013297A1
Transfer unit of processing equipment used for processing substrate, has electrically driven wheels and working drive assembly that are arranged in orthogonal manner with respect to transport carriages
DE102009008966A1
Rotary connection between components in clean room processing systems
DE102008058805A1
Processing system for flat substrates and transfer device therefor
DE102007009323A1
Clean room processing installation for e.g. solar panel, has chambers provided with delivery hole with closure element, and retracted by stroke adjustment of input-output module in transfer plane to coupling device
DE102005040741A1
Machining plant of modular construction for flat substrates
DE102005039452A1
Transfer device in handling or processing systems for large-area substrates
DE102005039453A1
Machining plant of modular construction for flat substrates
WO2005086207A1
Transfer device in manipulation and/or processing centres
DE102004058557A1
Transfer device for handling e.g. flat screen, has handling unit defined by shell, enclosure chamber defined by enclosure and shell chamber differentiated from shell, where two chambers form chambers of different pressure levels
DE102004058108A1
Transfer unit of a processing plant
DE102004010599A1
Transfer device in manipulation and/or processing centers of clean room systems, has transfer chambers combined to form structural unit
DE10259252A1
Work unit for clean room systems
DE10240936B3
Support connection, in particular tension connection, with a transmission element lying in the power flow
DE10232469A1
Transport system with a cassette-like stacking device
