| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Germany | 6 | |
| #2 | EPO (European Patent Office) | 3 | |
| #3 | WIPO (World Intellectual Property Organization) | 2 | |
| #4 | Australia | 1 | |
| #5 | China | 1 | |
| #6 | Israel | 1 | |
| #7 | United States | 1 | |
| #8 | South Africa | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Packaging and shipping | |
| #3 | Materials and metallurgy | |
| #4 | Chemical engineering |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Transport or storage devices | |
| #3 | Cleaning | |
| #4 | Treatment of glass |
| # | Name | Total Patents |
|---|---|---|
| #1 | Niese Matthias | 13 |
| #2 | Franzke Joerg | 11 |
| #3 | Schweckendiek Juergen | 10 |
| #4 | Osterkamp Juergen | 5 |
| #5 | Joerg Franzke | 1 |
| #6 | Kaltenbach Konrad | 1 |
| #7 | Matthias Niese | 1 |
| #8 | Schweckendiek Jurgen | 1 |
| #9 | Stadler Maximilian Dr | 1 |
| #10 | Juergen Schweckendiek | 1 |
| Publication | Filing date | Title |
|---|---|---|
| DE102005015758A1 | Method and device for etching substrates received in an etching solution | |
| DE10308842A1 | Device for gripping a plurality of substrates | |
| DE10215284A1 | Method and apparatus for drying substrates | |
| DE10215283A1 | Device for receiving substrates | |
| DE10215044A1 | Process for etching and drying substrates | |
| DE10127042A1 | Method for treating or handling substrates e.g. for wafers or silicon discs, involves supporting substrate in lower edge region on supporting elements | |
| EP0731495A2 | Process and device for cleaning silicon wafers |