| # | Country | Total Patents | |
|---|---|---|---|
| #1 | China | 16 | |
| #2 | United States | 7 | |
| #3 | Singapore | 1 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Micro-structure and nano-technology | |
| #3 | Computer technology | |
| #4 | Semiconductors | |
| #5 | Control | |
| #6 | Chemical engineering | |
| #7 | Engines, pumps and turbines | |
| #8 | Civil engineering |
| # | Name | Total Patents |
|---|---|---|
| #1 | Loopstra Erik Roelof | 2 |
| #2 | Meltens J J S M | 1 |
| #3 | Steffens Koen | 1 |
| #4 | Kruijt-Stegeman Yvonne Wendela | 1 |
| #5 | Van Der Ham Ronald | 1 |
| #6 | Van Bilsen Franciscus Bernardus Maria | 1 |
| #7 | Kurt R | 1 |
| #8 | Jau Jack | 1 |
| #9 | Koen Steffens | 1 |
| #10 | Johan Dijsseldonk Antonius Van | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2007238037A1 | Imprint lithography | |
| CN1441318A | Method for producing photoetching equipment and device |