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Methods and apparatus for downstream dissociation of gases
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Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
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Methods and apparatus for calibration and metrology for an integrated RF generator system
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Stabilization of electronegative plasmas with feedback control of RF generator systems
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Ozonated water flow and concentration control apparatus
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RF power supply with integrated matching network
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Inductively-coupled toroidal plasma source
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Integrated plasma chamber and inductively-coupled toroidal plasma source
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Toroidal low-field reactive gas source
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Permanent magnet ecr plasma source with integrated multipolar magnetic confinement
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Disk furnace for thermal processing
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Sputter deposition apparatus
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In-line sputter deposition system
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Method and system for cleaning semiconductor elements
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Toroidal low-field reactive gas source
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Liquid cooling microwave plasma applicator and liquid cooling dielectric window for microwave plasma system
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Automatic impedance matching apparatus and method
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Microwave plasma sticking source
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Fluid-cooled dielectric window for a plasma system
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Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube
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