| # | Country | Total Patents | |
|---|---|---|---|
| #1 | WIPO (World Intellectual Property Organization) | 9 | |
| #2 | United States | 8 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Surface technology and coating | |
| #3 | Semiconductors |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Coating metallic material | |
| #3 | Semiconductor devices |
| # | Name | Total Patents |
|---|---|---|
| #1 | Chistyakov Roman | 17 |
| #2 | Abraham Bassam Hanna | 4 |
| Publication | Filing date | Title |
|---|---|---|
| US2011133651A1 | Apparatus and method for sputtering hard coatings | |
| US2007181417A1 | Method of ionized physical vapor deposition sputter coating high aspect-ratio structures | |
| WO2004095498A2 | High-density plasma source using excited atoms |