| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 12 |
| # | Industry | |
|---|---|---|
| #1 | Audio-visual technology | |
| #2 | Micro-structure and nano-technology | |
| #3 | Semiconductors | |
| #4 | Measurement |
| # | Name | Total Patents |
|---|---|---|
| #1 | Zoellin Jochen | 12 |
| #2 | Ehrenpfordt Ricardo | 8 |
| #3 | Schelling Christoph | 7 |
| #4 | Curcic Michael | 4 |
| #5 | Ante Frederik | 4 |
| #6 | Graf Juergen | 4 |
| #7 | Scholz Ulrike | 3 |
| #8 | Grosse Axel | 1 |
| #9 | Laermer Franz | 1 |
| #10 | Gehl Bernhard | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2015059482A1 | MEMS component |