ZEISS CARL MICROELECTRONIC SYS innovation strategy

Patent filings in countries

#	Country	Total Patents
#1	WIPO (World Intellectual Property Organization)	14
#2	EPO (European Patent Office)	9
#3	Germany	5
#4	United States	2

#	Technology
#1	Optical systems
#2	Analysing materials
#3	X-ray microscopes
#4	Photomechanical semiconductor production
#5	Measuring light
#6	Measuring length, angles and areas
#7	Unspecified technologies

Publication	Filing date	Title
US2004012847A1	2003-07-09	Displaceable optics in microscope illumination, particularly displaceable collector
DE10245231A1	2002-09-27	Arrangement for reducing coherence
DE10245229A1	2002-09-27	Arrangement for reducing the coherence of a light beam
DE10220815A1	2002-05-10	Reflective X-ray microscope e.g. for microlithography, includes additional subsystem arranged after first subsystem along beam path and containing third mirror
DE10220816A1	2002-05-10	Reflective X-ray microscope for examining an object in an object plane illuminates the object with beam wavelengths less than 30 nm while scanning it into an image plane as an enlarged object
DE10201315A1	2002-01-15	coherence-reducing