Catoptric and catadioptric imaging systems with adaptive catoptric surfaces
WO2005008334A2
Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology
WO2004090582A2
Method for constructing a catadioptric lens system
WO2004074881A2
Method and apparatus for dark field interferometric confocal microscopy
WO2004072688A2
Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities
WO2004070434A2
Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy