| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 18 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Chemical engineering | |
| #3 | Semiconductors | |
| #4 | Surface technology and coating | |
| #5 | Basic materials chemistry |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Plasma technique | |
| #3 | Semiconductor devices | |
| #4 | Coating metallic material | |
| #5 | Cleaning | |
| #6 | Soaps |
| # | Name | Total Patents |
|---|---|---|
| #1 | Yamazawa Yohei | 18 |
| #2 | Saito Masashi | 5 |
| #3 | Koshimizu Chishio | 5 |
| #4 | Yamawaku Jun | 4 |
| #5 | Denpoh Kazuki | 4 |
| #6 | Okunishi Naohiko | 2 |
| #7 | Iwasaki Masahide | 1 |
| #8 | Matsumoto Naoki | 1 |
| #9 | Murakami Norikazu | 1 |
| #10 | Iwata Manabu | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2011094996A1 | Plasma processing apparatus and plasma processing method | |
| US2011094995A1 | Plasma processing apparatus and plasma processing method | |
| US2011104902A1 | Plasma processing apparatus and plasma processing method | |
| US2007227662A1 | Plasma processing apparatus |