| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 11 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Chemical engineering | |
| #3 | Computer technology | |
| #4 | Semiconductors | |
| #5 | Surface technology and coating |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Plasma technique | |
| #3 | Coating metallic material | |
| #4 | Semiconductor devices | |
| #5 | Image data processing |
| # | Name | Total Patents |
|---|---|---|
| #1 | Hirayama Masaki | 11 |
| #2 | Ohmi Tadahiro | 7 |
| #3 | Nakagawa Masashi | 1 |
| #4 | Oki Yasuyuki | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2010170872A1 | Plasma processing apparatus and method for using plasma processing apparatus |