| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 5 | |
| #2 | Germany | 4 | |
| #3 | France | 4 | |
| #4 | Norway | 3 | |
| #5 | Sweden | 3 | |
| #6 | Canada | 2 | |
| #7 | Switzerland | 1 | |
| #8 | German Democratic Republic | 1 | |
| #9 | Finland | 1 | |
| #10 | United Kingdom | 1 | |
| #11 | Japan | 1 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Measurement | |
| #3 | Control |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | Optical systems | |
| #3 | Measuring length, angles and areas | |
| #4 | Analysing materials | |
| #5 | Special measuring | |
| #6 | Teaching materials |
| # | Name | Total Patents |
|---|---|---|
| #1 | Westerberg Gerhard | 19 |
| #2 | Jacobsen Hans | 4 |
| #3 | Westerberg G | 1 |
| #4 | Jacobsen H | 1 |
| #5 | Jieruharudo Uesuteruberugu | 1 |
| Publication | Filing date | Title |
|---|---|---|
| DE3148121A1 | METHOD AND DEVICE FOR CONTROLLING MICROMASKS | |
| US4226024A | Caliper | |
| US4060816A | Scanning apparatus, for producing masks for micro circuits | |
| US3903536A | Device for generating masks for microcircuits | |
| US3631612A | An apparatus for teaching purposes |