Learn more

ULVAC TECHNO LTD

Overview
  • Total Patents
    25
  • GoodIP Patent Rank
    122,840
About

ULVAC TECHNO LTD has a total of 25 patent applications. Its first patent ever was published in 1997. It filed its patents most often in Japan, China and Republic of Korea. Its main competitors in its focus markets surface technology and coating, electrical machinery and energy and semiconductors are ALCHIMER, NOVELLUS SYSTEMS INC and ULTECH CO LTD.

Patent filings in countries

World map showing ULVAC TECHNO LTDs patent filings in countries

Patent filings per year

Chart showing ULVAC TECHNO LTDs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Ito Masanori 6
#2 Fujii Katsunori 6
#3 Sato Hiroshi 5
#4 Ishimaru Yasushi 5
#5 Inayoshi Sakae 4
#6 Kadowaki Yutaka 4
#7 Ishigure Fumiaki 4
#8 Yoshida Toshinobu 4
#9 Akase Jinei 4
#10 Konishi Kensaku 3

Latest patents

Publication Filing date Title
JP2021001363A Mask cleaning method
JP2020193356A Component for film deposition apparatus, and film deposition apparatus including the same
WO2020026549A1 Substrate lift device and substrate transfer method
US2020411356A1 Power Supply Apparatus for Electrostatic Chuck and Substrate Control Method
JP2020132895A Method for regenerating oxide film of component made of aluminum
JP2017186582A Metal sheet and production method thereof
JP2012068017A Vacuum melting device and crucible unit
JP2013036061A Hearth liner, electronic beam heating source and electronic beam deposition device
TW201211293A Attachment mechanism for target
JP2012206064A Oil mist trap and container for oil mist trap
JP2012153942A Sheet for film forming apparatus and method of manufacturing the same
JP2008261573A Vacuum melting device and crucible unit
JPH11172470A Thin film peeling device and thin film peeling