|
EP3796362A1
|
|
Method of plasma processing a substrate in a plasma chamber and plasma processing system
|
|
EP3605115A1
|
|
Arc detector for detecting arcs, plasma system and method of detecting arcs
|
|
EP3605842A1
|
|
Balun and amplifier including the balun
|
|
EP3605582A1
|
|
Power converter and power supply system
|
|
EP3091559A1
|
|
Plasma impedance matching unit, system for supplying rf power to a plasma load, and method of supplying rf power to a plasma load
|
|
EP3054472A1
|
|
Arc treatment device and method therefor
|
|
EP3035365A1
|
|
Method of detecting an arc occurring during the power supply of a plasma process, control unit for a plasma power supply, and plasma power supply
|
|
US2014320015A1
|
|
Reducing stored electrical energy in a lead inductance
|
|
EP2905801A1
|
|
Method of monitoring the discharge in a plasma process and monitoring device for monitoring the discharge in a plasma
|
|
EP2905802A1
|
|
Method of detecting arcs in a plasma process and power supply for supplying an output quantity to a plasma process
|
|
KR20200071144A
|
|
High-rate reactive sputtering of dielectric stoichiometric films
|
|
US2015206711A1
|
|
Apparatus for generating and maintaining plasma for plasma processing
|
|
EP2804454A1
|
|
Electrical cabinet and module for an electrical cabinet
|
|
DE102013202428A1
|
|
Power supply arrangement for powering industrial processes
|
|
EP2541584A1
|
|
Generating a highly ionized plasma in a plasma chamber
|
|
DE102010038603A1
|
|
Dc plasma arrangement
|
