|
US5980707A
|
|
Apparatus and method for a magnetron cathode with moving magnet assembly
|
|
US5990668A
|
|
A.C. power supply having combined regulator and pulsing circuits
|
|
US5993613A
|
|
Method and apparatus for periodic polarity reversal during an active state
|
|
US5889391A
|
|
Power supply having combined regulator and pulsing circuits
|
|
US6011704A
|
|
Auto-ranging power supply
|
|
US5910886A
|
|
Phase-shift power supply
|
|
US5855745A
|
|
Plasma processing system utilizing combined anode/ ion source
|
|
US5682067A
|
|
Circuit for reversing polarity on electrodes
|
|
US5882492A
|
|
A.C. plasma processing system
|
|
US5415754A
|
|
Method and apparatus for sputtering magnetic target materials
|
|
US5262028A
|
|
Planar magnetron sputtering magnet assembly
|
