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Power supply for a hot-filament cathode
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Industrial hollow cathode
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Industrial hollow cathode with radiation shield structure
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Modular gridless ion source
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Ion-source neutralization with a hot-filament cathode-neutralizer
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Ion optics with shallow dished grids
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Ion-assisted magnetron deposition
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Magnetic field for small closed-drift thruster
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Hall-current ion source
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Apparatus for sputter deposition
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Pulsed operation of hall-current ion sources
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Ion optics
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Angular distribution probe
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Capacitively coupled radiofrequency plasma source
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Capacitively coupled radiofrequency plasma source
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Broad-beam electron source
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