Heterostructure fabricating method for complementary MOS device in e.g. electronic field, involves depositing silicon layers using vector gas and gaseous derivative of silicon, where vector gas is inert with respect to derivative
JP2005109478A
Method for manufacturing substrate for epitaxial growth
JP2004343052A
Method for manufacturing strained crystalline layer on insulator, semiconductor structure by same method, and manufactured semiconductor structure
JP2004343046A
Compliant substrate for heteroepitaxy, heteroepitaxial structure, and compliant-substrate fabricating method
JP2004200682A
Manufacturing method for material complex
JP2004279402A
Method of evaluating particle concentration in atmosphere of clean room or mini-environment