Detection of carriers for substrates in coating chambers
EP2772934A1
Method and system for naturally oxidizing a substrate
DE102012224500A1
Diffusion chamber, useful for thermal treatment of substrate of copper indium gallium selenide thin film solar cell, comprises vacuum chamber, and two half-shells arranged within vacuum chamber
DE102012215111A1
Method for preventing unauthorized replication of optical data carrier on replication device, involves comparing specific identification symbol with specific reference identification symbol during specific identification symbol availability
DE102012201953A1
Method and device for passivation of solar cells with an aluminum oxide layer
DE102011079053A1
Method for operating electric loads in alternating current (AC) network, involves driving positive half-waves for one electric load and negative half-waves for another electric load with phase angle in one operating mode
DE102011009131A1
Integrated device for manufacturing chalcopyrite-type thin-film solar cell for photovoltaic-field, has distributor module conveying substrate from one process module into another process module under defined atmospheric conditions
DE102010046780A1
Coating substrates with an alloy by sputtering
EP2415021A1
Method and device for aligning substrates
EP2414111A1
Method and device for identifying object and for tracking objects in a production process
EP2360291A1
Method and device for quick heating and cooling of a substrate and immediately coating same in a vacuum
DE102009040997A1
High pressure vaporizing cell for coating a substrate, comprises an interior area that is suited to reject steam of coating materials and is formed in such a way that steam atoms do not strike down itself in the operation of the cell
DE102009037290A1
Transport device with a deflectable sealing frame
DE102009016289A1
Object e.g. square-shaped wafer, identifying method for tracking object in production process, involves detecting unique, characteristic, optical features of object, and storing detected features as indicator of object
DE102009016288A1
Method and device for aligning substrates
DE102008032559A1
Device for embossing structures, particularly optical data media, semiconductor structures and microstructures, in substrate in closed pressure chamber of pressure chamber arrangement, has carrier for supporting substrate
EP2111304A1
Method and apparatus for dispensing a viscous fluid
DE102007029333A1
Use of thermosets when structuring substrates
DE102007021247A1
Induction heating for dynamic temperature control of a die
