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Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface
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Mountable and removable sensor
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System and method for reticle protection and transport
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In-situ method and apparatus for end point detection in chemical mechanical polishing
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Method for characterizing optical systems using holographic reticles
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Non-contact seal using purge gas
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Optical reduction system with elimination of reticle diffraction induced bias
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Apparatus, system, and method for precision positioning and alignment of a lens in an optical system
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Lithographic tool with dual isolation system and method for configuring the same
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Method and apparatus for optimizing the output beam characteristics of a laser
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Method and apparatus for optical system coherence testing
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Dual-stage lithography apparatus and method
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Layered block fluid delivery system
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Process chamber assembly with reflective hot plate
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Process chamber assembly with reflective hot plate and pivoting lid
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Method and system for selective linewidth optimization during a lithographic process
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Photoresist outgassing mitigation system method and apparatus for in-vacuum lithography
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Ultraviolet polarization beam splitter for microlithography
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Scanning framing blade apparatus
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