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SILICON VALLEY GROUP

Overview
  • Total Patents
    201
About

SILICON VALLEY GROUP has a total of 201 patent applications. Its first patent ever was published in 1978. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and Australia. Its main competitors in its focus markets optics, semiconductors and surface technology and coating are CHANG CHING-YU, AZ ELECTRONIC MATERIALS JAPAN and SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD.

Patent filings per year

Chart showing SILICON VALLEY GROUPs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Gurer Emir 25
#2 Zhong Tom 15
#3 Kowalski Jeffrey M 11
#4 Ivaldi Jorge S 10
#5 Bettes Ted C 10
#6 Sauer Donald R 10
#7 Ratliff Christopher T 10
#8 Mandal Robert P 10
#9 Ward Edmond R 10
#10 Tam Johann 10

Latest patents

Publication Filing date Title
CN1605112A Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface
WO0229495A1 Mountable and removable sensor
US2003031545A1 System and method for reticle protection and transport
AU7912601A In-situ method and apparatus for end point detection in chemical mechanical polishing
WO0209906A1 Apparatus and method for chemical mechanical polishing of substrates
WO0206899A2 Method for characterizing optical systems using holographic reticles
WO0184241A1 Non-contact seal using purge gas
WO0182000A1 Optical reduction system with elimination of reticle diffraction induced bias
AU5378301A Apparatus, system, and method for precision positioning and alignment of a lens in an optical system
US2002118346A1 Lithographic tool with dual isolation system and method for configuring the same
US2002118721A1 Method and apparatus for optimizing the output beam characteristics of a laser
WO0161296A1 Method and apparatus for optical system coherence testing
AU3271801A Dual-stage lithography apparatus and method
WO0116512A1 Layered block fluid delivery system
EP1536457A2 Process chamber assembly with reflective hot plate
US6416318B1 Process chamber assembly with reflective hot plate and pivoting lid
US6509952B1 Method and system for selective linewidth optimization during a lithographic process
US6369874B1 Photoresist outgassing mitigation system method and apparatus for in-vacuum lithography
US6480330B1 Ultraviolet polarization beam splitter for microlithography
US6307619B1 Scanning framing blade apparatus