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SHIBAZAKI YUICHI

Overview
  • Total Patents
    82
About

SHIBAZAKI YUICHI has a total of 82 patent applications. Its first patent ever was published in 1999. It filed its patents most often in United States and Japan. Its main competitors in its focus markets optics, machines and semiconductors are KANAYA YUHO, EBIHARA AKIMITSU and ICHINOSE GO.

Patent filings in countries

World map showing SHIBAZAKI YUICHIs patent filings in countries
# Country Total Patents
#1 United States 81
#2 Japan 1

Patent filings per year

Chart showing SHIBAZAKI YUICHIs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Shibazaki Yuichi 82
#2 Kanaya Yuho 8
#3 Hirukawa Shigeru 1
#4 Okutomi Akira 1
#5 Hidaka Yasuhiro 1
#6 Hirano Kazuhiro 1

Latest patents

Publication Filing date Title
US2011177461A1 Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method
US2011053062A1 Exposure method, exposure apparatus, and device manufacturing method
US2011053061A1 Exposure apparatus, exposure method, and device manufacturing method
US2011051108A1 Exposure method, exposure apparatus, and device manufacturing method
US2010297562A1 Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method
US2010296070A1 Exposure apparatus, exposure method, and device manufacturing method
US2010296071A1 Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US2010159403A1 Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US2010157274A1 Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable body
US2010157275A1 Exposure apparatus, exposure method, and device manufacturing method
US2010157276A1 Exposure apparatus, exposure method, device manufacturing method, and carrier method
US2010081095A1 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
US2010073653A1 Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US2010073652A1 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
US2010068660A1 Pattern forming method and device production method
US2009268174A1 Exposure apparatus, exposure method, cleaning apparatus, and device manufacturing method
US2009190110A1 Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
US2009190104A1 Movable body drive method and apparatus, exposure method and apparatus, pattern formation method and apparatus, and device manufacturing method
US2009201513A1 Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body
US2009207394A1 Stage device, exposure apparatus and method of producing device