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Tilt the filming equipment of conveying tray
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The graphite boat hoisting structure and PECVD device of the multiple graphite boats of Liftable
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Exhaust gas processing device
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Stretching structure for graphite boat plug-in sheet machine chip transmission line
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The reaction chamber structure of plasma deposition furnace
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A kind of position detecting system and quartz boat transfer device
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A kind of vertical feeding system of production line and silicon chip transmission system
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A kind of loading device of stable plated film
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Secondary positioning adjustment carrier and transfer car(buggy)
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For detecting the detection device, silicon wafer processing system and detection method of position of silicon wafer
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A kind of graphite boat is plugged into caching method
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Increase the PECVD reacting furnaces and its control method of heat source in a kind of stove newly
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A kind of application method of PFA pipes expanding device and the PFA pipe expanding devices
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Carry the delivery device of hermatic door and reacting furnace and encapsulating method with the mechanism
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A kind of device for graphite boat consolidation silicon chip
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A kind of air inlet mixing arrangement for PECVD device
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Chip drying system and chip load plate
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Accurately control boat system on the manipulator and multitube reative cell of stroke
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