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Intelligent manufacturing control system for whole solar cell factory
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Heating system and heating control method of PECVD (plasma enhanced chemical vapor deposition) equipment and PECVD equipment
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Method for processing plasma discharge abnormity
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High-speed continuous feeding system for sheet materials
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Automatic lobe of a leaf device
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Battery piece testing and sorting equipment
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Graphite boat sheet-reversing detection method, device and system based on vision
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System and method for controlling partitioned areas of wafer inserting machine
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Microwave antenna assembly of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment and flat plate type PECVD equipment
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Flat plate type ALD and PECVD combined equipment for growing aluminum oxide and silicon nitride films
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Feeding and discharging method for PECVD surface coating
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Feeding and discharging method for PECVD surface coating based on coating detection
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Tubular PECVD preheats system experimental apparatus
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Boat inlet and outlet device of tubular PECVD (plasma enhanced chemical vapor deposition) equipment and tubular PECVD equipment
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Manipulator capable of grabbing multiple graphite boats and grabbing method of manipulator
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Heating control method of annealing furnace and annealing furnace
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Preheating type tubular PECVD (plasma enhanced chemical vapor deposition) equipment and control method thereof
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Basket of flowers buffer memory station based on AGV dolly automatic conveying
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Continuous PECVD equipment
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PECVD equipment for preparing heterojunction battery thin film
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