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Enhanced sensitivity non-contact electrical monitoring of copper contamination on silicon surface
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Self-calibration in non-contact surface photovoltage measurement of depletion capacitance and dopant concentration
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Non-contact method for acquiring charge-voltage data on miniature test areas of semiconductor product wafers
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Determining composition of mixed dielectrics
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Method and system for elevated temperature measurement with probes designed for room temperature measurement
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Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage current
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Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage current
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Method for fast and accurate determination of the minority carrier diffusion length from simultaneously measured surface photovoltages
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Method for measuring stress induced leakage current and gate dielectric integrity using corona discharge
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Device for electrically contacting a floating semiconductor wafer having an insulating film
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Measurement of the interface trap charge in an oxide semiconductor layer interface
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