Semiconductor wafers` testing method, involves testing wafer by probes, and reducing heating energy with constant cooling efficiency, under consideration of detected increase of temperature of fluids flowing via tempered chuck device
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Method and apparatus for testing semiconductor wafers using a probe card using a tempered fluid jet
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Test device for semiconductor wafers to be tested by means of test tools
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Arrangement for testing semiconductor wafers
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Rotatable table for automatic tester - holds semiconductor wafers which can be electronically heated or cooled and subjected to pressure or vacuum
