| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 11 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Machines | |
| #3 | Micro-structure and nano-technology | |
| #4 | Semiconductors | |
| #5 | Measurement |
| # | Name | Total Patents |
|---|---|---|
| #1 | Owa Soichi | 11 |
| #2 | Nagasaka Hiroyuki | 3 |
| #3 | Suzuki Junji | 2 |
| #4 | Sugawara Ryu | 2 |
| #5 | Magome Nobutaka | 1 |
| #6 | Otaki Katsura | 1 |
| #7 | Tanitsu Osamu | 1 |
| #8 | Inoue Jiro | 1 |
| #9 | Takaiwa Hiroaki | 1 |
| #10 | Hirukawa Shigeru | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2013278912A1 | Spatial light modulator, exposure apparatus, and method for manufacturing device |