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JPS58161775A
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Discharging device
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JPS58147558A
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Formation of chromic film by sputtering
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JPS58141387A
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Sputtering device
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JPS58137225A
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Substrate loading/unloading mechanism
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JPS58135432A
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Pressure sensor
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JPS58131381A
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Cryogenic pump and refrigerator for said pump
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JPS58126980A
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Vacuum vapor deposition device
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JPS58124100A
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Method of confirming start of oil diffusion pump
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JPS58113830A
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Vacuum measuring device
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JPS58113372A
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Thin film covered body and its manufacture
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JPS58104180A
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Sputtering device for both sides
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JPS58100678A
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Sputtering deivce
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JPS5893872A
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Sputtering device
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JPS5893873A
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Electric discharge device
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JPS5891167A
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Plasma treating device
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JPS5883883A
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Display
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JPS5845379A
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High speed sputtering device
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JPS5878417A
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Vacuum vessel for thin film formation
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JPS5867864A
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Vacuum vapor deposition apparatus
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JPS5865376A
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Gas flow-rate controlling mechanism
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