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JP2000146556A
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Flatness measurement of contact part in vacuum- attracting device
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Vacuum chucking head
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Light irradiation device and surface inspecting device
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Method and device for surface inspection
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Method and apparatus for surface inspection
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Inspecting method and inspecting device for semiconductor wafer
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Optically molding apparatus
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Inspection equipment
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Inspection equipment
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Optical system for inspection, and inspection apparatus
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Inspection device
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Inspection device
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Inspection device
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Video signal processing unit
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