|
US2021027965A1
|
|
Micro-electromechanical system devices and methods
|
|
US2020141968A1
|
|
Accelerometer having a root-mean-square (rms) output
|
|
US2020041538A1
|
|
Near-zero power wakeup electro-mechanical system
|
|
US2019322522A1
|
|
Composite spring for robust piezoelectric sensing
|
|
US2020216310A1
|
|
Electrical connection to a micro electro-mechanical system
|
|
US2018282154A1
|
|
Method for manufacturing a micro electro-mechanical system
|
|
US10053360B1
|
|
Pseudo SOI process
|
|
US2018282153A1
|
|
Eutectic bonding with AlGe
|
|
US2017001858A1
|
|
Electronic systems with through-substrate interconnects and MEMS device
|
|
US2016334213A1
|
|
Phase-based measurement and control of a gyroscope
|
|
US2016061679A1
|
|
Pressure sensor including deformable pressure vessel(s)
|
|
US2015276532A1
|
|
Capacitance-based pressure sensor including pressure vessel(s)
|
|
US2014297212A1
|
|
Systems and Methods for Compensating for a Misalignment Angle Between an Accelerometer and a Magnetometer
|
|
US2014278191A1
|
|
Systems and Methods for Calibrating an Accelerometer
|
|
US2014245810A1
|
|
Single motor dynamic calibration unit
|
|
US2014195185A1
|
|
Angular velocity estimation using a magnetometer and accelerometer
|
|
EP2675748A2
|
|
Strengthened micro-electromechanical system devices and methods of making thereof
|
|
WO2012112395A2
|
|
Micro-electromechanical system devices having beams and methods of making same
|
|
WO2010114841A1
|
|
Directional tap detection algorithm using an accelerometer
|
|
US2008236282A1
|
|
System and method for detection of freefall with spin using two tri-axis accelerometers
|
