| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 12 | |
| #2 | WIPO (World Intellectual Property Organization) | 5 |
| # | Industry | |
|---|---|---|
| #1 | Micro-structure and nano-technology | |
| #2 | Measurement | |
| #3 | Semiconductors | |
| #4 | Optics | |
| #5 | Machines | |
| #6 | Electrical machinery and energy | |
| #7 | Chemical engineering |
| # | Name | Total Patents |
|---|---|---|
| #1 | Benzel Hubert | 17 |
| #2 | Schelling Christoph | 10 |
| #3 | Weber Heribert | 5 |
| #4 | Pinter Stefan | 4 |
| #5 | Pirk Tjalf | 4 |
| #6 | Fritz Joachim | 3 |
| #7 | Muchow Joerg | 3 |
| #8 | Krueger Michael | 3 |
| #9 | Friese Christoph | 3 |
| #10 | Sattler Robert | 3 |