| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Republic of Korea | 3 | |
| #2 | Taiwan | 3 | |
| #3 | WIPO (World Intellectual Property Organization) | 3 | |
| #4 | United States | 2 | |
| #5 | Singapore | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Engines, pumps and turbines | |
| #3 | Chemical engineering | |
| #4 | Electrical machinery and energy | |
| #5 | Mechanical elements |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Non-positive-displacement pumps | |
| #3 | Cleaning | |
| #4 | Special electric heating or lighting | |
| #5 | Pipes |
| # | Name | Total Patents |
|---|---|---|
| #1 | Kim Tae Wha | 10 |
| #2 | Kim Tae-Wha | 2 |
| Publication | Filing date | Title |
|---|---|---|
| KR20210004783A | Pump back stream preventing structure for semiconductor manufacturing device | |
| KR102073789B1 | Pump back stream preventing structure for semiconductor manufacturing device | |
| US2017287740A1 | Fume removal apparatus for semiconductor manufacturing chamber | |
| KR20150081934A | Gas interface box for semiconductor and display manufacturing facilities |