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Active shielding of conductors in MEMS devices
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Micromachined mechanical switch
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Method of manufacturing electrical conductors for a semiconductor device
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Method of manufacturing capacitive elements for a capacitive device
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Energy scavenger
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Displacement sensor with frequency output
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Inertial measurement unit and packages thereof
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Inductive-capactive sensor
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Excitation in micromechanical devices
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Excitation in micromechanical devices
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Method for manufacturing micromechanical structures.
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Rotational direction detecting
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Accelerometer
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Method for manufacturing an angular rate sensor
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