KR20180111707A
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Co-evaporation-deposition methods of plane source evaporation for high definition OLED devices
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KR20180080139A
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Framed large size plane type evaporation source apparatus
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KR20180009327A
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Circular plane type evaporation source for micro OLED production, and Evaporation device having it
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KR20170059333A
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Plane evaporation source and plane source evaporator deposition equipments for OLED device production
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KR20130100949A
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Large size organic film sputter deposition apparatus
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KR20130059138A
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Thermal co-evaporator of large area cigs thin film and 3-stage processes
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US2011027462A1
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Fast deposition system and method for mass production of large-area thin-film cigs solar cells
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KR20080022682A
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Large size organic film deposition apparatus and sputter deposition apparatus
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KR100767026B1
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Belt type plane evaporation source for oled deposition
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KR20070090533A
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Methods of substrate loading and unloading, substrate encapsulation and metal mask switching for large-sized oled manufacturing
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KR20070082721A
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Vertical deposition technique using belt type plane source for oled manufacturing
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KR20070082699A
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Array method of linear type crucible with multi nozzles for large-size oled deposition
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KR20070082725A
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Sputtering deposition apparatus and mask frame alignment for large size oled manufacturing
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KR20070082715A
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Roller system for substrate moving in oled manufacturing
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KR20070056190A
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In-line equipment using metal-plate belt source for oled manufacturing
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KR20070038640A
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Thermal induced sublimation technology with downward evaporation for large-sized oled manufacturing
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KR20060088984A
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Cell with linear crucible and selective nozzle for oled deposition process
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KR20060081943A
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Linear type multi-point crucible assembly for large-size oled deposition process
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KR20060060074A
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Ring-type source for oled vapor deposition and device for fixing a heat wire in ring-type source
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KR20060035308A
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Continuous supply assembly of thermal evaporation source for oled deposition process
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