|
TW201222715A
|
|
Thin substrate, mass-transfer bernoulli end-effector
|
|
TW201206787A
|
|
Opener for extreme ultra violet lithography reticle pods
|
|
TW200946422A
|
|
Bare reticle storage chamber and stocker
|
|
US7695239B2
|
|
End effector gripper arms having corner grippers which reorient reticle during transfer
|
|
AU2003245484A1
|
|
Universal reticle transfer system
|
|
US6494666B2
|
|
Simplified and enhanced SCARA arm
|
|
US6396072B1
|
|
Load port door assembly with integrated wafer mapper
|
|
US6239963B1
|
|
Wafer support with electrostatic discharge bus
|
|
US6610993B2
|
|
Load port door assembly with integrated wafer mapper
|
|
WO9928952A2
|
|
Wafer-mapping load port interface
|
|
TW363206B
|
|
Integrated wafer pod-load/unload and mass-transfer system
|
|
US5885045A
|
|
Integrated wafer pod-load/unload and mass-transfer system
|
|
US5934991A
|
|
Pod loader interface improved clean air system
|
|
US5706201A
|
|
Software to determine the position of the center of a wafer
|
|
US5870488A
|
|
Method and apparatus for prealigning wafers in a wafer sorting system
|
|
US5984610A
|
|
Pod loader interface
|
|
US5193969A
|
|
Wafer transfer machine
|
