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AU2003233485A1
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Fluid assisted cryogenic cleaning
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Method for selective metal film layer removal using carbon dioxide jet spray
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Apparatus and method for analysis of impurities in liquid carbon dioxide
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CO2jet spray nozzles with multiple orifices
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Carbon dioxide liquid and gas sensor apparatus for use with jet spray cleaning systems
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Wafer cleaning using a laser and carbon dioxide snow
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Carbon dioxide jet spray pallet cleaning system
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Apparatus for cleaning and testing precision components of hard drives and the like
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Use of electrostatic bias to clean non-electrostatically sensitive components with a carbon dioxide spray
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Integrated circuit chip module cleaning using a carbon dioxide jet spray
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Carbon dioxide jet spray disk cleaning system
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Apparatus and method for cleaning large glass plates using linear arrays of carbon dioxide (CO2) jet spray nozzles
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US5766061A
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Wafer cassette cleaning using carbon dioxide jet spray
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US5853962A
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Photoresist and redeposition removal using carbon dioxide jet spray
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US5837064A
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Electrostatic discharge protection of static sensitive devices cleaned with carbon dioxide spray
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EP0764500A1
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Polishing system and method for soft metal surfaces using CO2 snow
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