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JPS62188312A
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Outside air mixture-preventive device in heat treatment device for vertical-type semiconductor
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JPS62130534A
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Wafer conveyor for vertical wafer processor
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JPS62128524A
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Vertical type semiconductor thermal treatment equipment with reaction tube having multiple structure
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JPS62112329A
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Antioxidation of led-in semiconductor substrate
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JPS6235518A
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Outside air mixture preventing method and device of vertical semiconductor heat treating apparatus
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JPS6214437A
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Wafer transfer unit for vertical-type semiconductor heat treatment system
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JPS623001A
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External combustion oxidation device
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JPS61248425A
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Vertical type apparatus for semiconductor heat treatment
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JPS61216434A
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Thermal treatment equipment for semiconductor article
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JPS61156730A
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Vertical thermal treatment apparatus for semiconductor article
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JPS61144821A
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Wafer shifting apparatus for vertical heattreatment furnace
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JPS6127625A
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Heat treatment process and device of semiconductor wafer
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JPS6127626A
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Heat treatment process and applicable supporter of semiconductor wafer
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