Method and device for coating a reactor vessel and a reactor vessel
DE102013105607A1
Apparatus, used to produce silicon, includes bottom plate with first passages and electrodes, cover and gas-tight closable opening for introducing pre-heater in reaction chamber, which includes second passage and sliding contact element
DE102012103756A1
Lowering the temperature prevailing in a reaction zone of a trichlorosilane-synthesis reactor, comprises introducing a liquid chlorosilane into the reaction zone
DE102012103755A1
Synthesizing trichlorosilane, comprises converting metallic silicon and hydrogen chloride in reactor using aluminum as a catalyst, recycling aluminum chloride in the reactor leaked out from reactor, and reusing recycled aluminum chloride
DE102011120210A1
Preparing pure silicon, useful as raw material in e.g. solar industry, comprises introducing silicon containing gas, as input gas, into a upstream reactor and depositing hot separated bodies, which are silicons, on reactor surfaces
DE102011119353A1
Crushing semiconductor molding, comprises producing semiconductor molding having cavity, filling cavity with liquid having density anomaly effect, and cooling liquid below freezing point for producing pressure in cavity
DE102011117552A1
Device and method for applying a voltage to a variety of silicon bars in a cvd reactor
DE102011115782A1
Reactor with coated reactor vessel and coating process
DE102011113484A1
Separation device, useful for firing a silicon body in a separator actuator, comprises an attachment unit comprising the silicon body connectable with electrodes of the actuator, and heating device comprising a resistance heating element
CN103080387A
Process and apparatus for manufacturing polycrystalline silicon ingots
DE102011008854A1
Method for cutting semiconductor material e.g. silicon wafer, involves passivating semiconductor material by supplying microwave energy in presence of oxygen-containing gas atmosphere
DE102010056021B3
Nozzle assembly useful in a chemical vapor deposition reactor, comprises a nozzle body having an inlet, an outlet and a flow space between the inlet and outlet, and a control unit having an adjusting member and a fixing part
DE102010048602A1
Crucible for silicon, crucible arrangement and separation unit for a crucible
DE102010045041A1
CVD reactor / gas converter and electrode unit therefor
DE102010045040A1
Method and apparatus for producing silicon
DE102010032103A1
Method and apparatus for igniting silicon rods outside a CVD reactor
DE102010031819A1
Method and device for producing polycrystalline silicon blocks
DE102010026923A1
Recovering silicon from a saw suspension comprising silicon and cutting particles in a cooling fluid, useful e.g. in solar cell industry, comprises separation of silicon particle and cutting particles by sink-float separation method
DE102010024010A1
Method and device for producing polycrystalline silicon blocks
DE102010029496A1
Method for energy supply of a load in a deposition process, comprises providing first and second electrical variables by a first and second controllable electric ignition means, where the electrical variables differ itself in its amounts
