| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 8 | |
| #2 | WIPO (World Intellectual Property Organization) | 5 |
| # | Industry | |
|---|---|---|
| #1 | Measurement | |
| #2 | Optics | |
| #3 | Computer technology | |
| #4 | Semiconductors |
| # | Name | Total Patents |
|---|---|---|
| #1 | Brill Boaz | 13 |
| #2 | Sherman Boris | 3 |
| #3 | Sandik Shimon | 2 |
| #4 | Turovets Igor | 1 |
| #5 | Golber Rafael | 1 |
| #6 | Muzikovsky Vladimir | 1 |
| #7 | Gov Shahar | 1 |
| #8 | Korshunov Oleg | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2014028993A1 | Process control using non-zero order diffraction | |
| WO2009107143A2 | Line edge roughness measuring technique and test structure |