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ASM MICROCHEMISTRY OY

Overview
  • Total Patents
    69
About

ASM MICROCHEMISTRY OY has a total of 69 patent applications. Its first patent ever was published in 1998. It filed its patents most often in United States, Japan and Taiwan. Its main competitors in its focus markets surface technology and coating, semiconductors and machines are F T L CO LTD, ASM INT and ADVANCED MATERIAL TECH INC.

Patent filings in countries

World map showing ASM MICROCHEMISTRY OYs patent filings in countries

Patent filings per year

Chart showing ASM MICROCHEMISTRY OYs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Soininen Pekka T 17
#2 Elers Kai-Erik 15
#3 Lindfors Sven 13
#4 Bondestam Niklas 7
#5 Raaijmakers Ivo 7
#6 Soininen Pekka Juha 7
#7 Kilpi Vaino 7
#8 Haukka Suvi P 6
#9 Ritala Mikko 6
#10 Saanila Ville Antero 5

Latest patents

Publication Filing date Title
US6759325B2 Sealing porous structures
TW556314B Process for producing metal thin films by ALD
FI20011998A0 Method and apparatus for growing a thin film
JP2003055093A Method of depositing yttrium oxide and lanthanum oxide thin films
AU6037401A Process for producing integrated circuits
US6482733B2 Protective layers prior to alternating layer deposition
FI20010539A0 Growing transition metal nitride thin films by using compound having hydrocarbon, amino or silyl group bound to nitrogen as nitrogen source material
US6492283B2 Method of forming ultrathin oxide layer
US6599572B2 Process for growing metalloid thin films utilizing boron-containing reducing agents
CA2329568A1 Apparatus for growing thin films
CA2329566A1 Apparatus for growing thin films
TW548239B Process for producing aluminium oxide films at low temperatures
US6482262B1 Deposition of transition metal carbides
FI20001694A0 A method for growing a thin film on a substrate
TW524875B Method and apparatus for feeding gas phase reactant into a reaction chamber
TW496907B Method and apparatus of growing a thin film onto a substrate
FI991628A Method and apparatus for eliminating substances from gases
FI981959A0 Still for producing insulating oxide thin films