| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Japan | 3 | |
| #2 | United States | 3 | |
| #3 | WIPO (World Intellectual Property Organization) | 3 | |
| #4 | Republic of Korea | 2 | |
| #5 | EPO (European Patent Office) | 1 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Semiconductors |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | Semiconductor devices | |
| #3 | Processing photographic materials | |
| #4 | Cameras |
| # | Name | Total Patents |
|---|---|---|
| #1 | Horiuchi Takashi | 12 |
| #2 | Ohta Atsushi | 4 |
| #3 | Tanno Nobuyoshi | 4 |
| #4 | Sato Kei | 3 |
| #5 | Ota Atsushi | 1 |
| Publication | Filing date | Title |
|---|---|---|
| WO2005036623A1 | Substrate transporting apparatus and method, exposure apparatus and method, and device producing method | |
| JP2005136364A | Substrate carrying device, exposure device and device manufacturing method |